Ultrapure Water Flow Measurement, Simplified: Integrated Clamp-On Ultrasonic Solution

In semiconductor and electronics manufacturing, Ultrapure Water (UPW) is distributed across main feed lines and small-diameter sub-lines inside process tools (e.g., wafer cleaning, post-CMP rinsing, and chemical dilution). UPW is typically piped through high-purity PFA or PTFE tubing. For these lines, flow measurement requires not only precision and chemical compatibility, but also zero alteration to existing piping structures.

semiconductor and electronics manufacturing 
Clamp-on Ultrasonic flow meter

Traditional wetted flowmeters require pre-allocated space, adapters, and complex plumbing. Adding new monitoring points on fully assembled equipment often leads to tedious modification work. The RBCPD Series integrated clamp-on ultrasonic flow sensor from R&B Instrument Inc. offers a simpler, cost-effective, and easy-to-deploy alternative.

1. Non-Wetted Design Preserves Pure Fluid Integrity

The RBCPD Series utilizes transit-time ultrasonic measurement. By detecting time differences between upstream and downstream acoustic waves, the sensor accurately calculates fluid velocity. Installed entirely on the pipe exterior, it never touches the fluid, eliminating particulate/ionic contamination and avoiding flow path restrictions.

2. Close the Shell to Measure: Installation Method Drives Total Cost

The RBCPD Series integrates the sensing elements directly into the clamp-on mounting housing:

  • No Pipe Cutting Required: Place the tubing into the sensor channel, align the measurement area, and close/secure the top and bottom covers.

  • Reduced Complexity: Equipment manufacturers save assembly time, reduce extra plumbing fittings, and simplify standardization across batch-produced tools.

3. RBCPD Series Technical Specifications & Selection Table

Select the appropriate RBCPD model based on pipe outer/inner diameter and operating flow range:

Imperial Pipe Models:

ModelPipe OD (inch)Pipe ID (mm)Flow Range (L/min)Low Flow Cut-Off* (mL/min)
RBCPD025NB1/43--50--5pm 10
RBCPD032NB5/165--70--10pm 15
RBCPD038NB3/85--80--15pm 20
RBCPD050NB1/26--110--30pm 30
RBCPD063NB5/810--140--40pm 40
RBCPD075NB3/410--170--50pm 50
RBCPD100NB115--220--80pm 80
RBCPD125NB1\ 1/420--280--100pm 100

Metric Pipe Models:

ModelPipe OD (mm)Pipe ID (mm)Flow Range (L/min)Low Flow Cut-Off* (mL/min)
RBCPD006MB63--50--5pm 10
RBCPD008MB85--70--10pm 15
RBCPD010MB105--80--15pm 20
RBCPD012MB126--110--30pm 30
RBCPD016MB1610--140--40pm 40
RBCPD020MB2010--170--50pm 50
RBCPD026MB2615--220--80pm 80
RBCPD032MB322{--280--100pm 100

*Note: Low flow cut-off values can be adjusted via meter settings; values in the table represent typical references.

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