Ultrapure Water Flow Measurement, Simplified: Integrated Clamp-On Ultrasonic Solution
In semiconductor and electronics manufacturing , Ultrapure Water (UPW) is distributed across main feed lines and small-diameter sub-lines inside process tools (e.g., wafer cleaning , post-CMP rinsing , and chemical dilution). UPW is typically piped through high-purity PFA or PTFE tubing . For these lines, flow measurement requires not only precision and chemical compatibility, but also zero alteration to existing piping structures . semiconductor and electronics manufacturing Clamp-on Ultrasonic flow meter Traditional wetted flowmeters require pre-allocated space, adapters, and complex plumbing. Adding new monitoring points on fully assembled equipment often leads to tedious modification work. The RBCPD Series integrated clamp-on ultrasonic flow sensor from R&B Instrument Inc. offers a simpler, cost-effective, and easy-to-deploy alternative. 1. Non-Wetted Design Preserves Pure Fluid Integrity The RBCPD Series utilizes transit-time ultrasonic measurement . By detecting time ...